Research

Highly sensitive measurement equipment, e.g. atomic force microscopes, suffer from building vibration.

To counteract the vibration, active vibration isolation systems are best suited, since these units

achieve a very low remaining vibration level, especially for low frequency disturbances without the

resonance behavior of a passive vibration isolation system.

By using a velocity feedback controller, a so-called skyhook damper can be created, which uses the absolute velocity of the isolated payload as control input. After some signal conditioning the input signal is amplified and used to drive electrodynamic

actuators. Finally the actuator generates a force to minimize the motion of the isolated device. Read full article.

In the field of high-resolution measurement and manufacturing, effective vibration isolation measures are required to obtain

precise and repeatable results. This is particularly true for experiments or processes where the typical amplitudes of the

ambient vibration and the dimensions of the investigated or manufactured structures fall in the same range, e.g. submicron

semiconductor production, holographic interferometry, confocal optical imaging, and scanning probe microscopy.

In the active vibration isolation system examined, signals are acquired by extremely sensitive vibration detectors, and the vibration

is reduced using either local analog feedback control or digital model-based control to drive electrodynamic actuators.
Read full article.

In the fields of high-resolution metrology and manufacturing, effective vibration isolation measures are required to obtain

precise and repeatable results. This is particularly true when the amplitudes of ambient vibration and the dimensions of

the investigated or manufactured structure are comparable, e.g. in sub-micron semiconductor chip production,

holographic interferometry, confocal optical imaging, and scanning probe microscopy.

In the active vibration isolation and control system examined, signals are acquired by extremely sensitive vibration detectors and the vibration is reduced using a

feedback controller to drive electrodynamic actuators. Read full article.