Modeling and Control Techniques of an Active Vibration Isolation System

In the field of high-resolution measurement and manufacturing, effective vibration isolation measures are required to obtain

precise and repeatable results. This is particularly true for experiments or processes where the typical amplitudes of the

ambient vibration and the dimensions of the investigated or manufactured structures fall in the same range, e.g. submicron

semiconductor production, holographic interferometry, confocal optical imaging, and scanning probe microscopy.

In the active vibration isolation system examined, signals are acquired by extremely sensitive vibration detectors, and the vibration

is reduced using either local analog feedback control or digital model-based control to drive electrodynamic actuators.
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