Modeling and Parameter Identification of an Active Anti-Vib

Modeling and Parameter Identification of an Active Anti-Vibration System

In the fields of high-resolution metrology and manufacturing, effective vibration isolation measures are required to obtain
precise and repeatable results. This is particularly true when the amplitudes of ambient vibration and the dimensions of
the investigated or manufactured structure are comparable, e.g. in sub-micron semiconductor chip production,
holographic interferometry, confocal optical imaging, and scanning probe microscopy.

In the active vibration isolation and control system examined, signals are acquired by extremely sensitive vibration detectors and the vibration is reduced using a
feedback controller to drive electrodynamic actuators. Read full article.