Suppression of Micro Vibration for Steel Frames Using a Proof

Suppression of Micro Vibration for Steel Frames Using a Proof Mass Actuator

Vibration sensitive equipment, e.g. Scanning Electron Microscopes (SEM) or Nano Lithography
Systems, has to be isolated from the noisy environment. Active vibration isolation platforms guarantee
a very small remaining vibration amplitude on their isolated top plate. These vibration isolation platforms can be
positioned directly on the concrete floor but sometimes have to be installed on a support
frame.

Due to the compensation forces of the active isolation platform the support frame has to be
as rigid as possible. Read full article.